A small-scaled drop hammer testing apparatus has been developed and the applicability has been evaluated for an impact sensitivity test of used dry gas detoxifying absorbents which are applied in semiconductor manufacturing processes. As hazardous gases are concentrated and/or some reaction products may be formed on the surface of the absorbents during a detoxifying process, an impact sensitivity of the used absorbents could become higher than that of pure absorbents. The current impact sensitivity test, however, requires sample to be prepared in an atmospheric environment while used absorbents might change their properties during such preparation. In order to eliminate a risk of changes in the chemical properties and ensure a safety, an absorption process and a drop hammer test should be carried out under the same atmosphere, as is actually used in detoxifying process. Therefore, an apparatus providing hermetically-sealed condition has been developed to resolve the problem. In this research, results of a closed type apparatus were evaluated in comparison with existing data from conventional method. RDX (1, 3, 5-trinitroperhydro-1, 3, 5-triazine) was used as a test sample. The correlation between existing and new method was obtained and applicability was confirmed.
半導体産業に用いられる乾式除害剤の打撃感度試験に用いるため，小型落球感度試験を作成し，適用可能性について 評価した。除害プロセスでは，有害ガスが除害剤上で濃縮される，あるいは除害剤との反応生成物が除害中に生成し，使 用前の除害剤よりも感度が高くなるおそれがあるためである。既存の打撃感度試験器では試料を大気中で取り扱うが，吸 着後の除害剤が変性してしまう可能性がある。実験者の安全を確保し，有害ガスを吸着した物性を保持したまま測定す るため，落球感度試験を実際にプロセスで用いる場合と同様の雰囲気下で行う必要がある。この問題を解決するために， 密閉式の装置を作成した。本研究では，密閉式の装置を既存の手法と比較することで適用可能性を評価した。試料とし てRDXを用い，今回新たに作成した装置と既存の装置を比較して適用可能性を確認した。
drop hammer test, detoxifying absorbents, impact sensitivity, RDX.